Ion beam assisted deposition with a duoplasmatrona)

Ensinger, W.; Barth, M.; Martin, H.; Schröer, A.; Enders, B.; Emmerich, R.; Wolf, G. K.
May 1992
Review of Scientific Instruments;May92, Vol. 63 Issue 5, p3058
Academic Journal
One of the recent applications of ion sources is their use for ion beam assisted deposition of thin films and coatings. This method combines a coating technique such as evaporation or sputtering with bombardment with ions in the keV energy range. The required ions with defined energy, flux, and impact angle are delivered from an ion source. An apparatus for ion beam assisted evaporation with a duoplasmatron ion source is described. The features of the duoplasmatron with respect to application for ion beam assisted deposition such as beam shape, uniformity and intensity, ion-to-neutral ratio, and focused and defocused mode are discussed.


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