TITLE

In situ sensitive measurement of stress in thin films

AUTHOR(S)
Leusink, G. J.; Oosterlaken, T. G. M.; Janssen, G. C. A. M.; Radelaar, S.
PUB. DATE
May 1992
SOURCE
Review of Scientific Instruments;May92, Vol. 63 Issue 5, p3143
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A method for the in situ measurement of mechanical stress in thin films deposited in a vacuum system is presented. The bending of the substrate, a measure for mechanical stress in the deposited layer, is detected by reflecting two parallel laser beams off the surface of the substrate and measuring the angle between the two reflected beams. A hollow mirror in the path of the reflected beams acts as an "optical cantilever" and increases the sensitivity of this method, in the present setup it is possible to detect the difference between a flat substrate and a substrate with a radius of curvature of 6.5 km.
ACCESSION #
9785741

 

Related Articles

  • Universal stress generating device for investigations of transmission properties of optical fibers under mechanical perturbations. Wisniewski, Roland; Bock, Wojtek J. // Review of Scientific Instruments;Dec1991, Vol. 62 Issue 12, p2955 

    A universal apparatus is presented, designed to precisely generate a controlled state of mechanical stress upon any kind of optical fiber waveguide. With only minor procedural modifications, hydrostatic or radial pressure (up to about 300 MPa) can be generated, as well as an axial elongation up...

  • Measurement of stiffness and damping constant of self-assembled monolayers. Devaprakasam, D.; Biswas, S. K. // Review of Scientific Instruments;Mar2005, Vol. 76 Issue 3, p035102 

    We design and fabricate an apparatus which uses two dual double cantilever flexures to probe mechanical properties of self-assembled monolayers (SAM) under compression. The cantilevers were designed to give stiffness of the same order as the SAM. One of the cantilevers carrying the probe is...

  • Design and performance of a thin-film calorimeter for quantitative characterization of photopolymerizable systems. Roper, Todd M.; Guymon, C. Allan; Hoyle, Charles E. // Review of Scientific Instruments;May2005, Vol. 76 Issue 5, p054102 

    A thin-film calorimeter (TFC) was designed for the quantitative characterization of photopolymerizable systems. A detailed description of its construction indicates the ease with which a TFC can be assembled and the flexibility inherent in its design. The mechanics of operation were optimized to...

  • High-throughput resistivity apparatus for thin-film combinatorial libraries. Hewitt, K. C.; Casey, P. A.; Sanderson, R. J.; White, M. A.; Sun, R. // Review of Scientific Instruments;Sep2005, Vol. 76 Issue 9, p093906 

    An apparatus, capable of measuring the dc resistance versus temperature of a 49-member library prepared by thin-film deposition techniques was designed and tested. The library is deposited by dc magnetron sputtering onto 10.16 cm×10.16 cm alumina substrates on which are placed aluminum masks...

  • Uniaxial strain method for soft crystals: Application to the control of the electronic properties of organic conductors. Maesato, M.; Parkes, G.M.B.; Kaga, Y.; Bond, G.; Kondo, R.; Barnes, P.A.; Kagoshima, S.; Charsley, E.L. // Review of Scientific Instruments;Jan2000, Vol. 71 Issue 1 

    We developed the uniaxial strain method to compress a crystalline sample along any direction without involving Poisson's effect. The uniaxial strain is realized by inserting a composite of either the sample embedded in epoxy or the sample in frozen oil into a cylinder much harder than the sample...

  • Polyimide-Coated Capillary Tubing: Key Handling Issues. Macomber, Joe; Begay, Lamon // LC-GC North America;Sep2003 Supplement, Vol. 21 Issue 9, p72 

    Presents information regarding handling issues encountered when using capillary tubing. Recognition of the broad use of fused capillary tubing in analytical instrumentation; Importance of general handling, bending stress and cleaving on the lifetime service use of capillary arrays; Need to...

  • Strain-induced phase-matching and tunability of acoustic gratings in fibers. Diez, A.; Kakarantzas, G.; Birks, T. A.; Russell, P. St. J. // Applied Physics Letters;8/27/2001, Vol. 79 Issue 9, p1390 

    We study the effect of strain on the properties of a one-dimensional acoustic grating: a tapered optical fiber with a periodically varying diameter. Its spectral response has a strong frequency stop band for flexural waves. Changing the tension of the fiber changes the wave velocity, and so...

  • Measurement of thermal conductivity of thin films with a Si-N membrane-based microcalorimeter. Zink, B. L.; Revaz, B.; Cherry, J. J.; Hellman, F. // Review of Scientific Instruments;Feb2005, Vol. 76 Issue 2, p024901 

    We describe a method of measuring thermal conductivity of films as thin as 15 nm from 2–300 K and in magnetic fields up to at least 8 T using a silicon-nitride membrane based microcalorimeter. The thermal transport in the membrane is measured before and after a sample film is deposited on...

  • A Simple Technique for Determining Yield Strength of Thin Films. M.H. Gordon // Experimental Mechanics;Sep2002, Vol. 42 Issue 3, p232 

    A technique to measure the yield strength of thin films has been developed which combines experimental observations of deflection and plastic deformation with finite element predictions of stress. This technique relies on integrated circuit technology to build bridge and cross beam test...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics