In situ sensitive measurement of stress in thin films

Leusink, G. J.; Oosterlaken, T. G. M.; Janssen, G. C. A. M.; Radelaar, S.
May 1992
Review of Scientific Instruments;May92, Vol. 63 Issue 5, p3143
Academic Journal
A method for the in situ measurement of mechanical stress in thin films deposited in a vacuum system is presented. The bending of the substrate, a measure for mechanical stress in the deposited layer, is detected by reflecting two parallel laser beams off the surface of the substrate and measuring the angle between the two reflected beams. A hollow mirror in the path of the reflected beams acts as an "optical cantilever" and increases the sensitivity of this method, in the present setup it is possible to detect the difference between a flat substrate and a substrate with a radius of curvature of 6.5 km.


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