Automatic measurement system for photocapacitometry analysis

Nishizawa, Jun-ichi; Koike, Masayoshi; Dezaki, Kazushi; Shibata, Jiro
March 1986
Review of Scientific Instruments;Mar86, Vol. 57 Issue 3, p453
Academic Journal
Photoeapacitometry analysis and an automatic measurement system by computer are described. Photocapacitance is very useful for the detection and identification of deep levels in semiconductors which correspond to impurity or lattice defects. Photocapacitometry analysis has high sensitivity and high resolution for deep-level detection and can measure the deep levels in the actual device structure, for example p[sup +]n (or n[sup +]p) junction, Schottky diode, metal-insulatorsemiconductor (MIS) diode, and so on without destruction. Photocapacitance (PHCAP) measures the deep levels by photoexcitation without thermal excitation; therefore, the energy range of excitation in PHCAP is wider than that in the thermal excitation method. This system is designed for shortening the measuring time and increasing the measurement accuracy. The measurement sequence is controlled automatically and the data analysis is produced by computer. This system can make it possible to realize high-quality semiconductors and consequently the highly efficient and high-performance semiconductor devices.


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