Sheet-shaped plasma produced by electron cyclotron resonance heating

Shibata, Kanetoshi; Yugami, Noboru; Nishida, Yasushi
July 1994
Review of Scientific Instruments;Jul1994, Vol. 65 Issue 7, p2310
Academic Journal
A new production technique of sheet-shaped plasma by means of electron cyclotron resonance heating (ECRH) is proposed. The sheet plasma is produced in a vessel with rectangular cross section set in a rectangular magnetic field coil. The maximum density and electron temperature of the sheet plasma are about 2.6×10[sup 11] cm[sup -3] and 7 eV, respectively, in a typical argon gas pressure of P[sub 0]=5 × 10[sup -4] Torr. The sheet plasma has several peaks of the density profile across the plasma width. These modes appear according to the change of working gas pressure. Those parameters including plasma density, density profile, and ion energy are controllable. This plasma is expected to be useful for material processing or plasma-based high-energy particle accelerators.


Related Articles

  • Plasma potentials and performance of the advanced electron cyclotron resonance ion source. Xie, Z. Q.; Lyneis, C. M. // Review of Scientific Instruments;Sep94, Vol. 65 Issue 9, p2947 

    The mean plasma potential was measured on the LBL advanced electron cyclotron resonance (AECR) ion source for a variety of conditions. The mean potentials for plasmas of oxygen, argon, and argon mixed with oxygen in the AECR were determined. These plasma potentials are positive with respect to...

  • Characteristics of a microwave electron cyclotron resonance plasma source. Camps, Enrique; Olea, Oscar; Gutierrez-Tapia, C.; Villagran, Mayo // Review of Scientific Instruments;May95, Vol. 66 Issue 5, p3219 

    Presents the description and performance characteristics of a microwave electron cyclotron resonance overdense plasma source. Generation of the discharge by introducing the circular TE[sub 11] mode wave into a cylindrical wave; Measurement of plasma density and temperature using electric...

  • Ion and neutral temperatures in electron cyclotron resonance plasma reactors. Nakano, Toshiki; Sadeghi, Nader // Applied Physics Letters;2/4/1991, Vol. 58 Issue 5, p458 

    Studies ion and neutral temperatures in electron cyclotron resonance plasma reactors. Neutral temperatures in the source and downstream; Plasma etching fine line features.

  • Uniform plasma produced by a plane slotted antenna with magnets for electron cyclotron resonance. Sato, N.; Iizuka, S.; Nakagawa, Y.; Tsukada, T. // Applied Physics Letters;3/29/1993, Vol. 62 Issue 13, p1469 

    Demonstrates the production of a uniform electron cyclotron resonance plasma. Factors hindering the production of plasma uniformity in front of the substrates; Supervision of backward and forward microwave powers in the rectangular waveguide section; Magnetic polarity of the first and third rings.

  • A field-free dense plasma produced by electron cyclotron resonance in a linear multipole field. Fukao, Masayuki; Harada, Yasuo // Journal of Applied Physics;11/1/1992, Vol. 72 Issue 9, p3943 

    Presents a study that investigated a field-tree dense plasma produced by electron cyclotron resonance in a linear multipole field. Experimental setup and magnetic field structure; Plasma parameters; Results and discussion.

  • Experimental study of the hot and warm electron populations in an electron cyclotron... Friedlein, R.; Herpich, S.; Hiller, H.; Wirth, H.; Zschornack, G.; Tyrroff, H. // Physics of Plasmas;Jun95, Vol. 2 Issue 6, p2138 

    Presents an experimental study of the hot and warm electron populations in an electron cyclotron resonance argon-oxygen-hydrogen plasma. Deconvolution of the spectra; Electron distribution function; Effect of gas mixing on the densities of the hot and warm electron populations.

  • A 14.6-GHz ECR ion source for atomic physics and materials research with highly charged slow ionsa). Zschornack, G.; Birke, U.; Hofmann, D.; Mühle, C.; Musiol, G.; Schmidt-Böcking, H.; Schneider, M.; Stiebing, K. E.; Streitz, H.; Zippe, C. // Review of Scientific Instruments;May92, Vol. 63 Issue 5, p3078 

    A 14.6-GHz electron cyclotron resonance ion source has been designed and will be installed at the TU Dresden. Contrary to other ECR sources some features are foreseen for atomic physics experiments to study the source plasma. Beside the description of source construction and computer-aided...

  • Production of a large diameter electron cyclotron resonance plasma using a multislot antenna for... Ueda, Yoko; Tanaka, Masayoshi; Shinohara, Shunjiro; Kawai, Yoshinobu // Review of Scientific Instruments;Dec1995, Vol. 66 Issue 12, p5423 

    Reports on the experimental results on the production of a large diameter uniform electron cyclotron resonance plasma for plasma application with multislot antenna. Effect of the magnetic field configuration on plasma uniformity; Measurement of electromagnetic waves in the plasma.

  • Hot plasma effects on the polarization of electron cyclotron waves. Dumont, R.; Giruzzi, G. // Physics of Plasmas;Mar1999, Vol. 6 Issue 3, p660 

    Studies hot plasma effects on the polarization of electron cyclotron waves. Evolution of wave polarization; Relativistic corrections to the dielectric tensor.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics