TITLE

Quadruple thickness monitor with double backup

AUTHOR(S)
Strauven, H.; De Wijngaerdt, E.; Spinnewijn, J.; Verbeke, O. B.
PUB. DATE
February 1987
SOURCE
Review of Scientific Instruments;Feb1987, Vol. 58 Issue 2, p313
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A quadruple thickness monitor, based on quartz oscillators, in order to control the co-evaporation of quaternary alloys, is described in detail. Saturated crystals can be changed without interrupting the vacuum. The system is satisfactory in very high vacuum (no degassing at 10-8 Torr) and can be adapted to ultrahigh vacuum.
ACCESSION #
9782414

 

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