TITLE

Ultrahigh vacuum atomic force microscope using a pantograph inchworm mechanism

AUTHOR(S)
Hosaka, Sumio; Honda, Yukio; Hasewaga, Tsuyoshi; Yamamoto, Tatsuharu; Kondo, Masayoshi
PUB. DATE
December 1993
SOURCE
Review of Scientific Instruments;Dec1993, Vol. 64 Issue 12, p3524
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
An ultrahigh vacuum atomic force microscope (UHV–AFM) with tunneling current detection has been developed. This microscope uses a new type of pantograph inchworm system. The features of the inchworm system are (i) operation of the clamp in normal clamping mode, (ii) an enlargement of the piezo device stroke for clamper stroke, and (iii) compact system for easy use. Our UHV–AFM has (i) six inchworm movements based on the new mechanism, and (ii) a sharp AFM probe whose tip is machined by a focused ion beam fabrication technique. UHV pressure experiments demonstrate that this system provides a contamination-free surface and can observe atomic resolution AFM images of MoS2 and silicon carbide.
ACCESSION #
9782237

 

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