TITLE

Reentrant cavity as a low-power plasma source

AUTHOR(S)
Brown, M. R.; Sheridan, T. E.; Hayes, M. A.
PUB. DATE
December 1986
SOURCE
Review of Scientific Instruments;Dec1986, Vol. 57 Issue 12, p2957
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A low-power source of plasma employing ECRH microwave breakdown in a reentrant cavity is described. The cavity has the following features: its dimensions can be made much smaller than its resonant wavelength, cavity Q values of several hundred are not difficult to achieve, and the vacuum rf electric field is uniform near its center. The plasma density to power ratio is roughly 10[sup 9] cm[sup -3] per watt for powers up to about 10 W. A smooth radial profile and a temperature of 5-10 eV are observed, and the plasma is very quiescent (δn/n is less than 1%). The cavity's construction and performance is described and compared to the performance of a simple loop antenna in a nonresonant structure.
ACCESSION #
9781976

 

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