TITLE

Phase-modulated ellipsometer using a Fourier transform infrared spectrometer for real time applications

AUTHOR(S)
Canillas, A.; Pascual, E.; Drévillon, B.
PUB. DATE
August 1993
SOURCE
Review of Scientific Instruments;Aug1993, Vol. 64 Issue 8, p2153
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A new Fourier transform infrared phase-modulated ellipsometer is presented. It combines the high frequency provided by a photoelastic modulator (37 kHz) with the low frequency of the Fourier transform infrared spectroscopy (<1 kHz), by means of a numerical data acquisition system. A full spectrum recording (from 900 to 4000 cm[sup -1]) can be achieved in 2 s. Thus, it allows its adaptation for kinetic in situ studies. The optical setup and the data reduction procedure are presented. In particular, a self-consistent spectral calibration procedure is described in detail. The precision in ψ and Δ increases from 0.3° to 0.02° when increasing the integration time from 2 to 760 s. The examples shown in this article illustrate the high sensitivity to identify and analyze the absorption vibration variations of ultrathin films (a few angstroms thick).
ACCESSION #
9781839

 

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