TITLE

Design of an ultrahigh-vacuum specimen environment for high-resolution transmission electron microscopy

AUTHOR(S)
McDonald, M. L.; Gibson, J. M.; Unterwald, F. C.
PUB. DATE
April 1989
SOURCE
Review of Scientific Instruments;Apr89, Vol. 60 Issue 4, p700
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A JEOL 200CX high-resolution transmission electron microscope with point-to-point resolution of 2.5 Å has been modified to achieve an ultrahigh-vacuum specimen environment (∼ 10[sup -9]τ). In situ heating and evaporation are provided in the specimen viewing position, where high resolution can be maintained at temperatures exceeding 600°C. Our design employs complete differential pumping of the specimen chamber and the use of a He-cooled cyroshield at the specimen for best vacuum attainment. Our design philosophy permits the instruments to be used for a wide variety of in situ experiments, including low-pressure (< 10 ¹τ) gas reaction.
ACCESSION #
9780550

 

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