Growth and characterization of silicon thin films employing supersonic jets of SiH4 on

Mullins, C.B.; Pacheco, K.A.
December 1997
Journal of Applied Physics;12/15/1997, Vol. 82 Issue 12, p6281
Academic Journal
Studies the growth and characterization of silicon thin films employing supersonic jets of SiH4 on polysilicon and Si(100). Experimental procedure used; Definition of the reaction probability; Results and discussion of the study.


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