TITLE

Growth and characterization of silicon thin films employing supersonic jets of SiH4 on

AUTHOR(S)
Mullins, C.B.; Pacheco, K.A.
PUB. DATE
December 1997
SOURCE
Journal of Applied Physics;12/15/1997, Vol. 82 Issue 12, p6281
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Studies the growth and characterization of silicon thin films employing supersonic jets of SiH4 on polysilicon and Si(100). Experimental procedure used; Definition of the reaction probability; Results and discussion of the study.
ACCESSION #
9712232928

 

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