Transmission electron microscopy analysis of a multiple quantum wire structure fabricated by

Ressier, L.; Peyrade, J.P.
March 1997
Journal of Applied Physics;3/15/1997, Vol. 81 Issue 6, p2596
Academic Journal
Presents the results of transmission electron microscopy (TEM) observations of cross section specimens, acquired through a highly localized preparation technique which includes electron-beam lithography (EBL) and reactive ion etching (RIE). Configuration of the sample; Thinning technique and TEM observation conditions.


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