Sematech breakthrough: Using copper on wafers

McGrath, Dylan
August 1997
Electronic News;08/18/97, Vol. 43 Issue 2181, p8
Trade Publication
Announces the production of Sematech Inc.'s first copper metallized wafers. Advantages of using copper on silicon; Concern about aluminum on silicon wafers; Implications for the advancement of the semiconductor manufacturing technology for Sematech members.


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