TITLE

PVD cluster tool marketed by Varian

PUB. DATE
May 1997
SOURCE
Electronic News;05/12/97, Vol. 43 Issue 2167, p4
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Reports on the launching of a vapor deposition (PVD) cluster tool known as Inova by Varian. Use of the machine in the metalization of 0.18 micron semiconductors.
ACCESSION #
9705185372

 

Related Articles

  • Varian adds multichamber PVD system.  // Electronic News;8/15/94, Vol. 40 Issue 2027, p46 

    Reports that Varian Associates has introduced the M2i multichamber physical vapor deposition (PVD) system suited for aluminum metallization for contact and via fill of submicron geometries and for titanium/titanium nitride barriers. Price range; New transfer arm mechanism as the key element;...

  • Planetary system plates silicon wafers.  // Machine Design;1/11/96, Vol. 68 Issue 1, p50 

    Features an electroplating machine developed by American Plating Systems in Ontario, California which uniformly deposits a 1 to 60-micrometer-thick metallic layer on the silicon wafer surface. Hastening of the application of thin metallic coatings to semiconductor wafers; Use of a...

  • Genus unveils 0.25-micron deposition cluster tool.  // Electronic News;12/5/94, Vol. 40 Issue 2043, p52 

    Reports on Genus Inc.'s Genus 7000 modular tungsten silicide chemical vapor deposition (CVD) system. Capabilities; Specifications; Enhancements; Pricing and availability; Applications.

  • ALD, CVD in one tool.  // Solid State Technology;Nov2008, Vol. 51 Issue 11, p34 

    The article reviews the chemical vapor deposition and atomic layer deposition machine manufactured by Altatech.

  • Superconductor Technologies.  // Electronic News;11/29/93, Vol. 39 Issue 1991, p17 

    Reports on Superconductor Technologies' installation of a chemical vapor deposition (CVD) system. Projected impact on capability to manufacture superconductors; Applications; Machine manufacturer.

  • Goldstar uses Genus CVD.  // Electronic News;5/9/94, Vol. 40 Issue 2013, p24 

    Reports on Goldstar Electron's purchase of chemical vapor deposition (CVD) system from Genus Inc. to use in the production of 16-megabit DRAMS. Comparison with monosiland silicide films.

  • Quester makes sales in Korea.  // Electronic News;5/30/94, Vol. 40 Issue 2016, p44 

    Reports that Quester Technology Inc. has received orders for its APT-5800 atmospheric chemical vapor deposition system from various South Korean integrated circuit manufacturers. Applications; Capabilities; Sum of the contracts.

  • MRC unveils two deposition systems.  // Electronic News;8/15/94, Vol. 40 Issue 2027, p56 

    Reports that Materials Research Corp. has introduced two new deposition systems for application-specific fabrication. Phoenix CVD 2000 chemical vapor deposition system; Primus 2500 PVD.

  • Applied enhances PVD productivity.  // Electronic News;12/5/94, Vol. 40 Issue 2043, p52 

    Reports on Applied Materials' Endura VHP physical vapor deposition (PVD) system. Capabilities; Specifications; Enhancements; Support and compatibility; Pricing and availability; Applications.

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics