SMC to use aging wafer fab for MEMS

Cohen, Sarah
March 1997
Electronic News;3/10/97, Vol. 43 Issue 2158, p20
Trade Publication
Reports on Standard Microsystems Corp.'s (SMC) decision to dedicate its 2.0-micron, four-inch wafer fab to the production of micro-electro-mechanical systems (MEMS). SMC's plan to become the leader in MEMS technology; SMC's background in manufacturing MEMS devices; SMC's augmentation of its equipment through the addition of specialized process modules.


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