ASML unveils first step-scan system

Erkanat, Judy
February 1997
Electronic News;02/10/97, Vol. 43 Issue 2154, p6
Trade Publication
Reports on the release of ASM Lithography's first step-and-scan system called PAS 5500/500. Capabilities and operating cost; Schedule for shipments; Estimated overall wafer stepper market; Stage design; Advantages of step-and-scan lithography over step-and-expose systems.


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