Bragg-diffraction-type acousto-optic device using Pb(ZrTi)O[sub 3] film

Lee, Changho; Kim, Sangho; No, Kwangsoo
May 2003
Applied Physics Letters;5/12/2003, Vol. 82 Issue 19, p3153
Academic Journal
We fabricated a hybrid-type acousto-optic [AO] device [Pb(Zr,Ti)O[SUB3](PZT)/TiO[SUBx] /SiO[SUB2]/SiN[SUBx]/SiO[SUB2]/Si] and analyzed AO Bragg diffraction efficiency (ζ) to estimate the applicability of piezoelectric PZT to a Bragg-diffraction-type AO device. A surface acoustic wave (SAW) was generated on the PZT film, and an optical beam (He-Ne laser) was guided in the SiN[SUBx] film. ζ was varied to 9% in the AO devices fabricated with various AO quality factors (Q) and film thicknesses of top SiO[SUB2] and PZT film, respectively. Using the results, we qualitatively analyzed the decay of SAW power to the film depth direction and AO figure of merit (M[SUB2] = 0.75× 10[SUP-18] s[SUP3]/g of the SiN[SUBx] film.


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