Dynamic modeling and scaling of nanostructure formation in the lithographically induced self-assembly and self-construction

Wu, Lin; Chou, Stephen Y.
May 2003
Applied Physics Letters;5/12/2003, Vol. 82 Issue 19, p3200
Academic Journal
We numerically studied the dynamical formation process and the scaling of the nanostructures in the lithographically induced self-assembly and self-construction of thin polymer films. Our studies show that the period of the self-assembled pillars depends on the ratio between the surface tension force and the electrostatic force. The viscosity of the polymer has no effect on the final pillar shape. When the feature width of the mold is comparable to or smaller than the most unstable disturbance wavelength of the system, the initially self-assembled pillars will merge to form a self-constructed mesa.


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