Dynamic control and modal analysis of coupled nano-mechanical resonators

Scheible, Dominik V.; Erbe, Artur; Blick, Robert H.
May 2003
Applied Physics Letters;5/12/2003, Vol. 82 Issue 19, p3333
Academic Journal
We present measurements on nanomechanical resonators allowing full in situ tuning of their dynamic properties, including higher-order nonlinearities (up to fifth order) and the mechanical quality factor Q. This is accomplished by gating electrodes and balancing resonators, similarily to a classical tuning fork. A detailed modal analysis is performed and reproducibility of the device response is verified. Eigenfrequencies are in the range of 40 to 70 MHz, and quality factor rises up to Q ∼6 × 10[SUP3].


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