TITLE

Improvement of discharge capacity of LiCoO[sub 2] thin-film cathodes deposited in trench structure by liquid-delivery metalorganic chemical vapor deposition

AUTHOR(S)
Cho, Sang-In; Yoon, Soon-Gil
PUB. DATE
May 2003
SOURCE
Applied Physics Letters;5/12/2003, Vol. 82 Issue 19, p3345
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Pt collector and LiCoO[SUB2] cathode films were deposited onto trench-SiO[SUB2] /Si substrates by liquid-delivery metalorganic chemical vapor deposition (LDMOCVD). The 100-nm-thick Pt thin films deposited at 350°C showed the lowest resistivity and roughness and step-coverage of 57% in trench structure (aspect ratio-1). The LiCoO[SUB2] cathode films (step-coverage = 51%) deposited onto a Pt collector showed an increase of approximately two and half times the discharge capacity compared with those of planar-cathode films. The LDMOCVD process is suitable to improve the discharge capacity of LiCoO[SUB2] cathode films using a trench structure in lithium rechargeable batteries.
ACCESSION #
9697688

 

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