A probe-positioning method with two-dimensional calibration pattern for micro-multi-point probes

Yashiro, Wataru; Shiraki, Ichiro; Miki, Kazushi
May 2003
Review of Scientific Instruments;May2003, Vol. 74 Issue 5, p2722
Academic Journal
A probe-positioning method for micro-multi-point probes that can be independently driven is proposed. By the electron-beam lithography technique, we fabricated a 0.5 mm×0.5 mm-sized probe-positioning pattern matrix consisting of 750 nm×750 nm-sized cells. Each cell has 150 nm×150 nm-sized pits that represent a bit array, which specifies its address. Reading the address information on the pattern with the microprobes allowed us not only to determine the probe positions, but also to calibrate the orientation and dimension of each scan. © 2003 American Institute of Physics.


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