Dielectric function of nanocrystalline silicon with few nanometers (<3 nm) grain size

Losurdo, Maria; Giangregorio, Maria Michela; Capezzuto, Pio; Bruno, Giovanni; Cerqueira, M. F.; Alves, E.; Stepikhova, M.
May 2003
Applied Physics Letters;5/5/2003, Vol. 82 Issue 18, p2993
Academic Journal
The dielectric function of nanocrystalline silicon (nc-Si) with crystallite size in the range of 1 to 3 nm has been determined by spectroscopic ellipsometry in the range of 1.5 to 5.5 eV. A Tauc-Lorentz parameterization is used to model the nc-Si optical properties. The nc-Si dielectric function can be used to analyze nondestructively nc-Si thin films where nanocrystallites cannot be detected by x-ray diffraction and Raman spectroscopy.


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