TITLE

Silicon wafer holds buried optical waveguide

PUB. DATE
December 1994
SOURCE
Laser Focus World;Dec94, Vol. 30 Issue 12, p13
SOURCE TYPE
Periodical
DOC. TYPE
Article
ABSTRACT
Reports on the entrapment of light at wavelengths greater than 1.3 micrometer by an optical wave guide beneath a silicon wafer surface. Functions of cobalt disilicide.
ACCESSION #
9606176040

 

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