TITLE

Report from MRS spring meeting '96

AUTHOR(S)
E.K.
PUB. DATE
June 1996
SOURCE
Solid State Technology;Jun96, Vol. 39 Issue 6, p54
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Highlights presentations made during the Materials Research Society spring 1996 meeting. Includes the analysis of changes necessary for the industry to stay on the Semiconductor Industry Association's National Technology Roadmap for Semiconductors; Required back end of line (BEOL) processes for the 0.1-micron generations of integrated circuits; On chip test structure to characterize electromigration failures.
ACCESSION #
9606166631

 

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