TITLE

Laser-produced-plasma sources shine brighter

AUTHOR(S)
Marx, Bridget
PUB. DATE
April 2003
SOURCE
Laser Focus World;Apr2003, Vol. 39 Issue 4, p34
SOURCE TYPE
Periodical
DOC. TYPE
Article
ABSTRACT
Reports on the advantages of extreme-ultraviolet (EUV) sources based on laser-produced plasma (LPP). Use of laser radiation to heat a target to the optimum temperature required for efficient EUV production; Power scalability of EUV sources through the tuning of laser parameters; Factors that affect the EUV emission from an LPP source; Optimization of conversion efficiency of laser energy into EUV radiation.
ACCESSION #
9586446

 

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