Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses

Kondo, Toshiaki; Matsuo, Shigeki; Juodkazis, Saulius; Mizeikis, Vygantas; Misawa, Hiroaki
April 2003
Applied Physics Letters;4/28/2003, Vol. 82 Issue 17, p2758
Academic Journal
Femtosecond laser pulses are useful for laser microfabrication through multiphoton absorption. However, it is difficult to create interference of femtosecond pulses for the fabrication of periodic structures. In this letter, we report the fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses. Scanning electron microscopy revealed a rod structure arranged into a square lattice. The possibility of controlling the period of the lattice, rod thickness, and rod shape were demonstrated.


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