TITLE

Experiments and Identification of the Unbalance of Aerostatic Guideways on the Micro-Scale

AUTHOR(S)
Dongju Chen; Yanhua Bian; Jinwei Fan
PUB. DATE
March 2014
SOURCE
Sensors (14248220);Mar2014, Vol. 14 Issue 3, p4416
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
In order to diagnose the unbalance of aerostatic guideways, displacement and acceleration sensors were used to measure the vibration signals of the unbalance of the aerostatic guideways caused by the gas fluctuation. The frequency characteristics for the unbalance of aerostatic guideways caused by gas fluctuation has been extracted from the measured signals by power spectral density, and the basic frequencies of the guideway system have been diagnosed according to spectral characteristics, in agreement with the results calculated by the corresponding motion equations and the finite element method.
ACCESSION #
95106724

 

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