Metal layer Bragg–Fresnel lenses for diffraction focusing of hard x-rays

Li, Youli; Yasa, Mario; Pelletier, Olivier; Safinya, Cyrus R.; Caine, Ernie; Hu, Evelyn E.; Fernandez, Patricia
April 2003
Applied Physics Letters;4/14/2003, Vol. 82 Issue 15, p2538
Academic Journal
A thin-film Bragg-Fresnel lens (BFL) was developed for diffractive focusing of hard x-rays into submicron to nanometer spots for scanning x-ray spectromicroscopy. The lens is made of metal-layer Fresnel zones deposited on an x-ray reflective substrate. The use of a high-density lens structure reduces the thickness of the lens and simplifies the fabrication process. Linear and elliptical lenses made of a 200-nm-thick Au film were fabricated using e-beam lithography and a metal deposition process. The focusing capabilities of the Au layer BFLs were demonstrated at the Advanced Photon Source.


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