TITLE

Samsung Licenses ASML's Scattering Bar

PUB. DATE
March 2003
SOURCE
Electronic News;3/31/2003, Vol. 49 Issue 13, pN.PAG
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Announces that Samsung Electronics Co. Ltd. has signed a licensing agreement with ASML Holding NV for its scattering bar technology. Benefits of the ASML scattering bar technology; Comments from Dinesh Bettadapur, president and chief executive officer of ASML MaskTools.
ACCESSION #
9459852

 

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