Cymer Begins Shipping XL-100 Sources

February 2003
Electronic News;2/10/2003, Vol. 49 Issue 6, pN.PAG
Trade Publication
Reports on the announcement of excimer laser supplier Cymer Inc. on February 10, 2003 that it has shipped its first XLA 100 argon fluoride light source to a lithography system supplier on February 1, 2003. Features of the light source; List of its clients; Cost-effectiveness of the light source.


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