TITLE

Cymer Begins Shipping XL-100 Sources

PUB. DATE
February 2003
SOURCE
Electronic News;2/10/2003, Vol. 49 Issue 6, pN.PAG
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Reports on the announcement of excimer laser supplier Cymer Inc. on February 10, 2003 that it has shipped its first XLA 100 argon fluoride light source to a lithography system supplier on February 1, 2003. Features of the light source; List of its clients; Cost-effectiveness of the light source.
ACCESSION #
9383419

 

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