TITLE

Rockwell Rolls Out Direct Write EBL

PUB. DATE
December 2002
SOURCE
Electronic News;12/23/2002, Vol. 48 Issue 52, pN.PAG
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Reports on the launching of a direct electron beam lithography (EBL) services from Rockwell Scientific Co. LLC (RSC) utilizing the JBX 6000FS/E tool from JEOL USA Inc. Overview of specific EBL services; Other services offered by RSC; Key features of the JEOL JBX 6000FS/E.
ACCESSION #
9383027

 

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