TITLE

Tegal, STMicro Continue Working on Cobalt Silicide Gate Etch

PUB. DATE
December 2002
SOURCE
Electronic News;12/16/2002, Vol. 48 Issue 51, pN.PAG
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Reports on the first phase of a joint development project with STMicroelectronics completed by semiconductor equipment maker Tegal Corp. Information on how Tegal has made a successful niche among the larger players in capital equipment; Focus of the second and final phase of the project with STMicroelectronics.
ACCESSION #
9383013

 

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