Phase-unifying mirrors for high-power XeF excimer lasers

De Tomasi, F.; Aghamkar, P.; Perrone, M. R.; Protopapa, M. L.; Piegari, A.; Andre’, B.; Ravel, G.
March 2003
Applied Physics Letters;3/24/2003, Vol. 82 Issue 12, p1809
Academic Journal
A phase-unifying unstable cavity of magnification factor M=5.8 has been applied to a high-power, commercial XeF laser, and the measurements for characterizing near- and far-field beam properties are reported. A laser beam of 280 mJ, 30 ns duration, a cross section of 2.4 × 1.3 cm², and a beam quality factor of 4.3 along the discharge direction (x axis) and of 2.1 along the y direction has been obtained. The beam exhibits a smooth far-field profile with more than 90% of the total near-field energy within a far-field full angle θ≤0.04 mrad. The beam angular stability is of 0.009 and of 0.004 mrad along x and y, respectively.


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