Room-temperature grain growth in sputter-deposited Cu films

Detavernier, C.; Deduytsche, D.; Van Meirhaeghe, R. L.; De Baerdemaeker, J.; Dauwe, C.
March 2003
Applied Physics Letters;3/24/2003, Vol. 82 Issue 12, p1863
Academic Journal
The microstructure of sputter-deposited Cu films is shown to be unstable at room temperature (RT). The average grain size increases significantly during RT storage for a couple of hours after deposition. This RT grain growth is shown to be very dependent on the deposition parameters (substrate temperature and sputter gas pressure) and hence on the microstructure of the as-deposited film. The microstructure of sputter-deposited films is usually summarized in a structure-growth-zone model. It is found that significant RT grain growth only occurs for Cu layers with a zone-T-type, as-deposited microstructure.


Related Articles

  • Microstructural comparisons of ultrathin Cu films deposited by ion-beam and dc-magnetron sputtering. Prater, W. L.; Allen, E. L.; Lee, W.-Y.; Toney, M. F.; Kellock, A.; Daniels, J. S.; Hedstrom, J. A.; Harrell, T. // Journal of Applied Physics;5/1/2005, Vol. 97 Issue 9, p093301 

    We report and contrast both the electrical resistance and the microstructure of copper thin films deposited in an oxygen-containing atmosphere by ion-beam and dc-magnetron sputtering. For films with thicknesses of 5 nm or less, the resistivity of the Cu films is minimized at oxygen...

  • Growth mechanism and electrical properties of metallic films deposited on silicone oil surfaces. Hongliang Ge; Chunmu Feng; Ye, Gaoxiang; Ren, Yuhang; Jiao, Zhengkuan // Journal of Applied Physics;12/1/1997, Vol. 82 Issue 11, p5469 

    Studies the microstructure and the growth mechanisms of films deposited on silicone oil surfaces by the rf-magnetron sputtering method. Dependence of the growth rate on the film thickness and the substrate temperature; Direct current resistance of the film; Effects of the liquid substrate.

  • Microstructures and the corresponding magnetic properties of half-doped Nd0.5Sr0.5MnO3 films. Prokhorov, V. G.; Hyun, Y. H.; Park, J. S.; Kim, J. B.; Kim, G. H.; Lee, Y. S.; Lee, Y. P.; Svetchnikov, V. L. // Journal of Applied Physics;Nov2008, Vol. 104 Issue 10, p103901 

    The microstructural and magnetic properties of amorphous, nanoclustered, and self-organized bilayer Nd0.5Sr0.5MnO3 films, prepared by rf magnetron sputtering, are investigated. The amorphous film was found to be a typical paramagnet with free motion of the individual Mn spins, and the magnetic...

  • Magnetoelastic effects in amorphous wires and amorphous ribbons with nonmagnetic thin-film coatings. Wun-Fogle, M.; Savage, H. T.; Kabacoff, L.T.; Hathaway, K. B.; Merchant, J. M.; Beihoff, B. // Journal of Applied Physics;11/15/1988, Vol. 64 Issue 10, p5405 

    Presents a study that measured the magnetomechanical coupling in amorphous ribbons which have been coated by magnetron sputtering on one or both sides with copper films. Description of iron-metalloid metallic glass ribbons; Effect of coating ribbons on one side only; Magnetoelastic effects in...

  • Cobalt Redistribution over the Surface of Inhomogeneous Cobalt—Copper Alloy Films. Stognij, A. I.; Koriakin, S. V.; Novitskii, N. N. // Technical Physics;Apr2003, Vol. 48 Issue 4, p496 

    The surfaces of electrodeposited 1-μm-thick Co[sub x]Cu[sub 100 – ][sub x](x=8,11,and20at.%) films and also of 0.2-μm-thick films obtained by sputtering targets made of the electrodeposited films with an argon ion beam are analyzed by atomic force microscopy, scanning electron...

  • Nanoscale Growth Twins in Sputtered Metal Films. Zhang, X.; Anderoglu, O.; Hoagland, R. G.; Misra, A. // JOM: The Journal of The Minerals, Metals & Materials Society (TM;Sep2008, Vol. 60 Issue 9, p75 

    This article reviews recent studies on the mechanical properties of sputtered copper and 330 stainless-steel films with (111) nanoscale growth twins preferentially oriented perpendicular to growth direction. The mechanisms of formation of growth twins during sputtering, unusually high strengths,...

  • CIGS Thin Films for Cd-Free Solar Cells by One-Step Sputtering Process. Xiang, Jun; Huang, Xing; Lin, Gengqi; Tang, Jiang; Ju, Chen; Miao, Xiangshui // Journal of Electronic Materials;Jul2014, Vol. 43 Issue 7, p2658 

    Cu(InGa)Se (CIGS) thin films were deposited by a one-step radio frequency (RF) magnetron sputtering process using a quaternary CIGS target. The influence of substrate temperature on the composition, structure, and optical properties of the CIGS films was investigated. All the CIGS films...

  • Microstructure and magnetic properties of multilayer [(Nd[sub 2]Fe[sub 14]B)[sub x]/M][sub n] films (M=Nb or Cr). Tsai, Jai-Lin; Chin, Tsung-Shune; Yao, Yeong-Der; Kronmu¨ller, H. // Journal of Applied Physics;5/15/2002 Part 1, 2 & 3, Vol. 91 Issue 10, p8177 

    Multilayer [(Nd[sub 2]Fe[sub 14]B)[sub χ] / M][sub n] films (χ being thickness in nm; M = Nb or Cr, with a fixed thickness 5 nm; n being the number of layers) have been deposited by ion-beam sputtering. Spacer layer was found to have substantial effects on the multilayers to exhibit...

  • Exchange biasing in sputtered NiFe/PtMn bilayers. Xi, Haiwen; Bian, Bo; Laughlin, David E.; White, Robert M. // Journal of Applied Physics;5/1/2000, Vol. 87 Issue 9, p4918 

    The exchange coupling between ferromagnetic Ni[sub 81]Fe[sub 19] and antiferromagnetic (AF) Pt[sub x]Mn[sub 1-x] films prepared by rf and dc magnetron sputtering has been investigated. The Pt content in the Pt[sub x]Mn[sub 1-x] film is in the range of 0 at. %


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics