Fabrication of coupled quantum dots for multiport access

Holleitner, Alexander W.; Blick, Robert H.; Eberl, Karl
March 2003
Applied Physics Letters;3/24/2003, Vol. 82 Issue 12, p1887
Academic Journal
We introduce a versatile two-step electron-beam fabrication technique for defining multiport quantum dots in GaAs/AlGaAs heterostructures in close vicinity. Capacitive coupling of the two quantum dots is directly tuned electrostatically via two central gates. Parallel access is realized by patterning source and drain contact regions of both dots with an additional spacer layer. Conductance measurements give evidence of both the continuous wide-range tunability of the dots and parallel access to the circuit.


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