Visible photoluminescence from nanostructured Si-based layers produced by air optical breakdown on silicon

Kabashin, A. V.; Meunier, M.
March 2003
Applied Physics Letters;3/10/2003, Vol. 82 Issue 10, p1619
Academic Journal
Pulsed radiation of CO[sub 2] laser has been used to produce an optical breakdown on a silicon target in atmospheric air. After several breakdown initiations near the threshold of plasma production, a highly porous layer was formed under the radiation spot on the silicon surface. The fabricated layers presented the porosity of 75%-80% and were formed of silicon nanocrystals imbedded in SiO[sub 2] matrix. They exhibited strong photoluminescence (PL) around 2.0 eV, which was stable to a prolonged continuous illumination of samples. Possible mechanisms of nanostructure formation and PL origin are discussed.


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