Properties of zirconia thin films deposited by laser ablation

Cancea, V. N.; Filipescu, M.; Colceag, D.; Mustaciosu, C.; Dinescu, M.
November 2013
AIP Conference Proceedings;Nov2013, Vol. 1564 Issue 1, p138
Academic Journal
Zirconia thin films have been deposited by laser ablation of a ceramic ZrO2 target in vacuum or in oxygen background at 0.01 mbar. The laser beam generated by an ArF laser (λ=193 nm, ν=40 Hz) has been focalized on the target through a spherical lens at an incident angle of 45°. The laser fluence has been established to a value from 2.0 to 3.4 Jcm-2. A silicon (100) substrate has been placed parallel to the target, at a distance of 4 cm, and subsequently has been heated to temperatures ranging between 300 °C and 600 °C. Thin films morphology has been characterized by atomic force microscopy and secondary ion mass spectrometry. Biocompatibility of these thin films has been assessed by studying the cell attachment of L929 mouse fibroblasts.


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