TITLE

Low-cost, low-loss microlens arrays fabricated by soft-lithography replication process

AUTHOR(S)
Kunnavakkam, Madanagopal V.; Houlihan, F. M.; Schlax, M.; Liddle, J. A.; Kolodner, P.; Nalamasu, O.; Rogers, J. A.
PUB. DATE
February 2003
SOURCE
Applied Physics Letters;2/24/2003, Vol. 82 Issue 8, p1152
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
This letter describes a soft lithographic approach for fabricating low-cost, low-loss microlens arrays. An accurate negative reproduction (stamp) of an existing high-quality lens surface (master) is made by thermally curing a prepolymer to a silicone elastomer against the master. Fabricating the stamp on a rigid backing plate minimizes distortion of its surface relief. Dispensing a liquid photocurable epoxy loaded to high weight percent with functionalized silica nanoparticles into the features of relief on the mold and then curing this material with UV radiation against a quartz substrate generates a replica lens array. The physical and optical characteristics of the resulting lenses suggest that the approach will be suitable for a range of applications in micro and integrated optics.
ACCESSION #
9140776

 

Related Articles

  • Untitled. Dorsch, Jeff // Electronic News;1/3/94, Vol. 40 Issue 1995, p24 

    Previews the SPIE Symposium on Microlithography in San Jose, California set for March 2, 1994. Issues to be discussed.

  • New microlithography method.  // Solid State Technology;Nov95, Vol. 38 Issue 11, p24 

    Examines a new form of microlithography that utilizes neutral atoms instead of light to write patterns on silicon. Demonstration at United States (US) Commerce Department's National Institute of Standards and Technology.

  • Simple models for resist processing effects. Brunner, T.A.; Ferguson, R.A. // Solid State Technology;Jun96, Vol. 39 Issue 6, p95 

    Describes new, computationally efficient methods for incorporating the effects of resist processing into stimulated images in microlithography. Capability of the models to predict resist linewidths; PROLITH/2 resist profile modeling; Effect of incorporating a Fickian diffusion of the intensity...

  • Inert atoms carve out micro circuits on silicon chips.  // Chemical Business;Jan1996, Vol. 9 Issue 6, p50 

    Presents an abstract of a study on a form of microlithography using noble gas atoms instead of light to write patterns on silicons and published in the `Chemical Engineering' journal. Advantages of the technique; Use of metastable atoms to create circuit patterns on a high-resolution resist.

  • Square pegs into round holes: A critique of Neeley & Barton. Goring-Morris, A. Nigel // Antiquity;Mar1996, Vol. 70 Issue 267, p130 

    Focuses on the Levantine Epipalaeolithic prehistoric period. Description of Levantine Epipalaeolithic microliths; Microlith and blank metrics; Misconceptions concerning the microburin technique; Discussion on the Negev and Sinai Epipalaeolithic sites.

  • Combination of self-assembly and nanolithography as an effective nanofabrication methodology for device realization. Chowdhury, Devasish // Current Science (00113891);4/10/2009, Vol. 96 Issue 7, p923 

    Scanning probe-based nanolithography techniques are advantageous and have the potential to replace the expensive photolithography process. One of the scanning probe techniques is constructive nanolithography, which is a nano-electrochemical process of oxidizing only the terminal -CH3 group to...

  • On the conformation and the structure of polymacromonomers. Duplessix, R.; Heroguez, V. // European Physical Journal E -- Soft Matter;Sep2004, Vol. 15 Issue 1, p27 

    Using poly(-norbornenyl polystyrene) as a model we studied the conformation and the structure of branched polymer chains each of whose backbone constitutive units bear a branch. The parameters taken into account are: the polymerisation degree of the backbone, the molar mass of the branches and...

  • Tuneable elastomeric nanochannels for nanofluidic manipulation. Dongeun Huh; Mills, K. L.; Xiaoyue Zhu; Burns, Mark A.; Thouless, M. D.; Takayama, Shuichi // Nature Materials;Jun2007, Vol. 6 Issue 6, p424 

    Fluidic transport through nanochannels offers new opportunities to probe fundamental nanoscale transport phenomena and to develop tools for manipulating DNA, proteins, small molecules and nanoparticles. The small size of nanofabricated devices and the accompanying increase in the effect of...

  • Under Microscopes the Poly(styrene/butadiene) Nanoparticles. Xiaorong Wang; Pat Sadhukhan // Journal of Electron Microscopy;Dec2007, Vol. 56 Issue 6, p209 

    There has been considerable interest, both academic and industrial, in developing synthesis processes for making polymeric nanoparticles. Our effort relied on the nanoassembly concepts of block macromolecules in solutions to prepare particles with a hard core made of crosslinked plastics and a...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics