High-speed focused-ion-beam patterning for guiding the growth of anodic alumina nanochannel arrays

Liu, N. W.; Datta, A.; Liu, C. Y.; Wang, Y. L.
February 2003
Applied Physics Letters;2/24/2003, Vol. 82 Issue 8, p1281
Academic Journal
Long-range ordered arrays of anodic alumina nanochannels are grown by anodizing an aluminum covered with a patterned layer of polymethylmethacrylate (PMMA) resist. The two-dimensional hexagonal-closed-packed pattern is created by focused ion beam (FIB) exposure of the PMMA and transferred onto the aluminum surface by phosphoric acid etching. The required exposure time per channel is only ∼20 μs, more than two orders of magnitude reduction in comparison with the previous method employing FIB direct sputtering of the aluminum surface.


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