TITLE

Plasma measurements with triple and single probes in an asymmetrical parallel plate rf plasma reactor

AUTHOR(S)
Murata, Kinji; Kubo, Takashi; Kiwata, Hiroaki
PUB. DATE
July 1998
SOURCE
Review of Scientific Instruments;Jul98, Vol. 69 Issue 7, p2681
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Performs plasma measurements with triple and single probes in an asymmetrical parallel plate rf plasma reactor. Agreement on two probe characteristics with the single and triple probes; Connection of the compensation circuits to the probe system; Reason why the measurement results suffer from the effects of alternative component.
ACCESSION #
909285

 

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