FeCo–Zr–O nanogranular soft-magnetic thin films with a high magnetic flux density

Ohnuma, S.; Fujimori, H.; Masumoto, T.; Xiong, X. Y.; Ping, D. H.; Hono, K.
February 2003
Applied Physics Letters;2/10/2003, Vol. 82 Issue 6, p946
Academic Journal
Soft-magnetic thin films with high magnetic flux densities of about 23 kG have been fabricated in the (Fe-Co)-Zr-O nanogranular system. The films were prepared by reactive sputtering under an oxygen-argon atmosphere using a target of Fe-Co-Zr alloys. The microstructure was composed of base-centered-cubic Fe-Co nanograins, where nanoparticles of amorphous Zr oxide are dispersed. These Zr-oxide nanoparticles are thought to hinder the growth of Fe-Co grains during the film deposition, causing low coercivity.


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