Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

Melechko, A. V.; McKnight, T. E.; Guillorn, M. A.; Merkulov, V. I.; Ilic, B.; Doktycz, M. J.; Lowndes, D. H.; Simpson, M. L.
February 2003
Applied Physics Letters;2/10/2003, Vol. 82 Issue 6, p976
Academic Journal
We report a method to fabricate nanoscale pipes ("nanopipes") suitable for fluidic transport. Vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition are used as sacrificial templates for nanopipes with internal diameters as small as 30 nm and lengths up to several micrometers that are oriented perpendicular to the substrate. This method provides a high level of control over the nanopipe location, number, length, and diameter, permitting them to be deterministically positioned on a substrate and arranged into arrays.


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