TITLE

Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

AUTHOR(S)
Melechko, A. V.; McKnight, T. E.; Guillorn, M. A.; Merkulov, V. I.; Ilic, B.; Doktycz, M. J.; Lowndes, D. H.; Simpson, M. L.
PUB. DATE
February 2003
SOURCE
Applied Physics Letters;2/10/2003, Vol. 82 Issue 6, p976
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We report a method to fabricate nanoscale pipes ("nanopipes") suitable for fluidic transport. Vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition are used as sacrificial templates for nanopipes with internal diameters as small as 30 nm and lengths up to several micrometers that are oriented perpendicular to the substrate. This method provides a high level of control over the nanopipe location, number, length, and diameter, permitting them to be deterministically positioned on a substrate and arranged into arrays.
ACCESSION #
9036473

 

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