Characterization of the nanostructures of a lithographically patterned dot array by x-ray pseudo-Kossel lines

Lee, D. R.; Chu, Y. S.; Choi, Y.; Lang, J. C.; Srajer, G.; Sinha, S. K.; Metlushko, V.; Ilic, B.
February 2003
Applied Physics Letters;2/10/2003, Vol. 82 Issue 6, p982
Academic Journal
Grazing x-ray scattering from a nanofabricated periodic dot array exhibits an interesting diffraction pattern, resembling x-ray Kossel lines, due to the anisotropic x-ray resolution function. We demonstrate that the unique diffraction pattern can be used for precise characterization of the deep nanostructures, which cannot be obtained accurately by microscopy techniques.


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