Single-step fabrication of silicon-cone arrays

Wysocki, G.; Denk, R.; Piglmayer, K.; Arnold, N.; Bäuerle, D.
February 2003
Applied Physics Letters;2/3/2003, Vol. 82 Issue 5, p692
Academic Journal
A regular lattice of SiO[sub 2] microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones on a (100) Si surface. The experiments were performed with single-pulse 248 nm KrF laser radiation.


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