Observation of a localized electron beam in large-area microwave discharge

Terebessy, Tibor; Širý, Milan; Kando, Masashi; Kudela, Jozef; Korzec, Dariusz
February 2003
Applied Physics Letters;2/3/2003, Vol. 82 Issue 5, p694
Academic Journal
We report on a localized high-density electron beam in large-area microwave discharges in argon. The beam is observed only for certain antenna configurations at gas pressures of about 50 mTorr, and it strongly modifies the radial plasma density profiles. The beam current near the quartz plate is estimated to be ≈140 mA/cm².


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