Fabrication of nanometer-scale mechanical devices incorporating individual multiwalled carbon nanotubes as torsional springs

Williams, P. A.; Papadakis, S. J.; Patel, A. M.; Falvo, M. R.; Washburn, S.; Superfine, R.
February 2003
Applied Physics Letters;2/3/2003, Vol. 82 Issue 5, p805
Academic Journal
We report on the fabrication of nanometer-scale mechanical devices incorporating multiwalled carbon nanotubes (MWNTs) as the torsional spring elements. We have employed electron beam lithography to pattern device elements directly onto individual MWNTs on a silicon dioxide substrate. The structures were suspended by etching the substrate and subsequent critical-point drying of the sample. We also briefly present characterization of the torsional properties of an individual MWNT. The techniques described are applicable to other nanometer-scale rod-like objects.


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