TITLE

Single-crystal barium titanate thin films by ion slicing

AUTHOR(S)
Izuhara, T.; Gheorma, I.-L.; Osgood, R. M.; Roy, A. N.; Bakhru, H.; Tesfu, Yiheli M.; Reeves, M. E.
PUB. DATE
January 2003
SOURCE
Applied Physics Letters;1/27/2003, Vol. 82 Issue 4, p616
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Thin barium titanate films, 0.5-8 µm thick, are obtained from a single-crystal bulk sample using ion slicing. The process, based on ion implantation and anodic bonding, separates thin films having areas of ∼1 × 1 cm², from bulk crystals. The quality of the film is characterized by measurement of surface roughness and dielectric properties. The film permittivity retains its single-crystal value.
ACCESSION #
8954560

 

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