TITLE

Comparison of scanning probe microscopies with RBS and SEM/EDX for the analysis of RuO[sub 2] , TiO[sub 2] composites

AUTHOR(S)
Vallet, H.C.
PUB. DATE
October 1997
SOURCE
Applied Physics A: Materials Science & Processing;1997, Vol. 65 Issue 4/5, p387
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Scanning tunneling microscopy (STM) was used in the constant height mode for analyzing the local composition of (RuO[sub 2] , TiO[sub 2] ) mixed oxide thin films. A digital processing of the images leads to a bipolar distribution of values of current that reflects the difference in conductivity of metallic RuO[sub 2] and semiconducting TiO[sub 2] . The analytical results are compared with those from Rutherford backscattering spectrometry and energy dispersive X-ray imaging on these samples. STM, with digital processing of the current mapping image, shows promises for developing into a chemically sensitive probe of composite materials with nanometer spatial resolution.
ACCESSION #
8825345

 

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