Direct laser fabrication of blaze gratings in fused silica

Pfeifer, M.; Weissmantel, S.; Reisse, G.
July 2013
Applied Physics A: Materials Science & Processing;Jul2013, Vol. 112 Issue 1, p61
Academic Journal
Results of our investigations on direct laser fabrication of blaze gratings in fused silica using a special fluorine-laser mask projection technology allowing to produce plane and smooth reflecting areas and optimum blaze geometry will be presented. In particular, it will be shown that gratings with nearly optimum blaze geometry and relatively low surface roughness of the reflecting areas can be produced. The technique is a one-step method and has a high variability with regard to grating geometry and also substrate materials. We use masks made of tantalum foil, projected onto a fused silica substrate surface with a demagnification ratio of 26:1 and also novel scattering masks made of calcium fluoride. In these masks, up to 25 times smaller transmission apertures can be manufactured allowing thus grating constants in the range of a few μm. The average surface roughness of the reflecting areas along a blaze grating line was measured to be R=38 nm without any surface smoothing. The maximum variance of the blaze angle within one grating is about 0.5 degree.


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