TITLE

Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process

AUTHOR(S)
Malobabic, Sina; Jupé, Marco; Ristau, Detlev
PUB. DATE
June 2013
SOURCE
Applied Physics Letters;6/3/2013, Vol. 102 Issue 22, p221604
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Nowadays, Ion Beam Sputter (IBS) processes are very well optimized on an empirical basis. To achieve further progresses, a modification of the IBS process by guiding the coating material using an axial magnetic field and an additional electrical field has been studied. The electro-magnetic (EM) field leads to a significant change in plasma properties and deposition rate distributions, whereas an increase in deposition rate along the centerline of the axial EM field around 150% was observed. These fundamental studies on the prototype are the basis for the development of an applicable and workable design of a separation device.
ACCESSION #
88041275

 

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