TITLE

The canonical work function-strain relationship of the platinum metal: A first-principles approach to metal-gate transistor optimization

AUTHOR(S)
Wang, X. F.; He, L.; Halas, S.; Pienkos, T.; Lin, J. G.; Durakiewicz, T.
PUB. DATE
June 2013
SOURCE
Applied Physics Letters;6/3/2013, Vol. 102 Issue 22, p223504
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Work function [uppercase_phi_synonym] is a crucial factor in improving the high-k/metal gate stack. Here we present a systematic study of the strain-dependent work function on the Pt metal gate (100) surface using the first-principles calculation. We find that the compressive strain increases [uppercase_phi_synonym], while the tensile strain decreases its value, with the biaxial strain leading to the maximum change of [uppercase_phi_synonym]. We identify the mechanism of [uppercase_phi_synonym] modification by analyzing the effect of strain on the bulk electronic structure and surface dipole. Finally, we propose a canonical strain-[uppercase_phi_synonym] relationship, which provides a design principle for the work function tuning with strain.
ACCESSION #
88041268

 

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